SYEN 4182 - MEMS and Microsystems Laboratory

Two hours laboratory per week. One credit hours.

This laboratory course is an introduction to the principles of microfabrication for microelectronic devices, sensors, and micromechanical structures, MEMS, and microsystems with applications in engineering. Course comprised of laboratory work and accompanying lectures that cover silicon oxidation, photolithography, thin film deposition, etching, electrochemical deposition (plating) and packaging. Some selected topics in yield and reliability, as well as process simulation may be covered. Dual listed in the Graduate Catalog as SYEN 5182.

Prerequisites: SYEN 4376 and SYEN 4176 or consent of instructor.