May 03, 2024  
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SYEN 5182 - MEMS and Microsystems Laboratory

Two hours laboratory per week. One credit hours.

This laboratory course is an introduction to the principles of micro-fabrication for microelectronic devices, sensors, and micromechanical structures, MEMS, and microsystems with applications in engineering. Course comprises of laboratory work and accompanying lectures that cover silicon oxidation, photolithography, thin film deposition, etching, electrochemical deposition (plating) and packaging. Some selected topic in yield and reliability, as well as process simulation may be covered.

Prerequisites: SYEN 4376 and 4176, or consent of instructor.


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