ASCI 71803 - (was 7318) Micro- and Nano-Fabrication

Three credit hours.

Was ASCI 7318. Introduces some of the important micro- and nano-fabrication techniques that are mostly used in the areas of microelectronics and nanotechnology. Topics that will be covered include diffusion of impurities, thermal oxidation, ion implantation, optical lithography, thin film deposition, etching, nano-lithography, nano-imprinting, growth of nano-rods and nano-springs by glancing angle deposition, and growth of carbon nano-tubes. Students will become familiar with some of the basic experiments, including thin film and glancing angle depositions, etching, and film characterization techniques. Intended for graduate students from science and engineering majors.

Prerequisites: Instructor consent.