SYEN 5282 - Microelectromechanical Systems MEMS and Microsystems

Three hours lecture. Two credit hours.

In this introductory MEMS class, we cover the fundamental basis of microsystems technology. Microelectromechanical devices (MEMS), such as actuators, pressure sensors, and opto-mechanical assemblies, require knowledge of a broad range of disciplines, from microfabrication and mechanics to chemistry and solid state device physics. Note: Students enrolled in SYEN 5282 do a project related to course contents. SYEN 5282 is not open to students with credit for SYEN 4282.

Prerequisites: SYEN 3372 or equivalent and corequisite concurrent SYEN 5182 or equivalent with a grade of C or better.