ASCI 7318 - Micro- and Nano-Fabrication

Three credit hours.

This course will introduce some of the important micro- and nano-fabrication techniques that are mostly used in the areas of microelectronics and nanotechnology. Some of the topics that will be covered include diffusion of impurities, thermal oxidation, ion implantation, optical lithography, thin film deposition, etching, nano-lithography, nano-imprinting, growth of nano-rods and nano-springs by glancing angle deposition, and growth of carbon nano-tubes. During the course, students will become familiar with some of the basic experiments including thin film and glancing angle depositions, etching, and film characterization techniques. The course is intended for graduate students from science and engineering majors.

Prerequisites: Consent of instructor.